National Academy of Sciences of Belarus

PILIPENKO Vladimir Aleksandrovich

Vladimir Aleksandrovich Pilipenko (b. 18.07.1949, Mozyr, Gomel region), physicist. Corresponding Member of the National Academy of Sciences of Belarus (2000). Doctor of Engineering Sciences (1991), Professor (1995).

Performed research in the field of controlled modification of the properties of semiconductors, thin films of metals and dielectrics. He discovered effects that accelerate the processes of modifying the properties of various materials under the influence of light pulses and suggested the mechanisms for their occurrence: doubling the diffusion coefficient of impurities and the absence of the effect of pushing the base by the emitter during solid-state recrystallization of ion-alloyed silicon layers; the formation of the equilibrium, thermostable structure of doped aluminum films and their contact with silicon; single-stage formation of titanium disilicide. He developed methods for calculating temperature regimes and determined the optimal conditions that ensure the minimization of such stresses. Carried out the modeling of the formation of various thin-film systems using rapid heat treatment: gettering, melting fusible glasses, recrystallization of aluminum films, diffusion synthesis of silicides of various metals, etc. Developed a technology for creating integrated circuits based on fast heat treatments.

Author of about 260 scientific papers, including 7 monographs, 40 inventions.

Major papers:

  1. Физические основы быстрой термообработки. Создание многоуровневой металлизации. Мн.: БГУ, 2000 (в соавт.).
  2. Физические основы быстрой термообработки. Геттерирование, отжиг ионолегированных слоев, БТО в технологии СБИС. Мн.: БГУ, 2001 (в соавт.).
  3. Физические основы быстрой термообработки. Отжиг поликристаллического кремния, диэлектрических пленок, очистка поверхности и эпитаксия. Мн., 2002 (в соавт.).
  4. Быстрые термообработки в технологии. СБИС. Мн.: Изд. центр БГУ, 2004.