National Academy of Sciences of Belarus

LABUNOV Vladimir Arkhipovich

LABUNOV Vladimir Arkhipovich

Vladimir Arkhipovich Labunov (b. 16.03.1939, Orsha, Vitebsk region), a scientist in the field of microelectronics. Academician of the National Academy of Sciences of Belarus (1986; corresponding member since 1980), Doctor of Engineering Sciences (1975), Professor (1977). Honored Inventor of the BSSR (1978).

Investigated the physico-chemical processes associated with the interaction of electrolytes, low-temperature plasma, ion beams and optical radiation with the surface of a solid; built physical models of basic technological, electrochemical, ionic and photonic processes for creating semiconductor and hybrid integrated circuits, and based on them developed a system of end-to-end computer-aided design. Developed a highly efficient basic electrochemical processes for the production of elements of semiconductor and hybrid integrated circuits; ion-plasma, ion-beam, pulsed lamp, laser photochemical technological processes for individual processing of semiconductor wafers, as well as microprocessor-controlled equipment for carrying out these processes.

The State Prize of the Republic of Belarus in 1992 for the creation and industrial implementation of a highly efficient system technology for the mass production of super-large integrated circuits. First Prize of the Presidium of the Academy of Sciences of the USSR in 1978 for the best fundamental developments in the field of microelectronics.

Author of more than 200 scientific papers, incl. monographs and 14 brochures, 460 inventions.

Awarded with the Order of the October Revolution (1986) and the Red Banner of Labor (1981), a medal.

Major papers:

  1. Окисление металлов и полупроводников в низкотемпературной кислородной плазме (совм. с В.П. Пархутиком) // Обзоры по электронной технике. Серия Микроэлектроника. 1978. Вып. 1.
  2. Современные системы ионной имплантации (совм. с Н.И. Даниловичем) // Зарубежная электронная техника. 1982. № 3.
  3. Формирование силицидов импульсной термообработкой пленочных структур (в соавт.) // Там же. 1985. № 8.