National Academy of Sciences of Belarus

ONEGIN Evgeny Evgenievich

Evgeny Evgenievich Onegin (17.07.1932, Kostroma, Russia – 22.11.2002), a scientist in the field of electronic engineering. Corresponding Member of the National Academy of Sciences of Belarus (1986), Doctor of Engineering Sciences (1982), Professor (1989).

Research in the field of the theory of designing precision process equipment for the production of large and extra-large integrated circuits, the principles of its construction and manufacturing technology. Developed new physical and technological principles for the construction of optical-mechanical and assembly equipment in the production of microelectronic products and means for their implementation.

Author of about 100 scientific papers, incl. 2 monographs, 46 inventions.

State Prize of the USSR in 1973 for the development and introduction into mass production of high-frequency transistors of the KT-315 series.

Awarded with the Order of Lenin (1981), the October Revolution (1986), the Red Banner of Labor (1976), the medal.

Major papers:

  1. Робототехника в технологическом оборудовании для микроэлектроники // Электронная промышленность. 1981. Вып.10.
  2. Обеспечение точности и производительности прецизиционного оборудования // Там же. 1983, №1.
  3. Точное машиностроение для микроэлектроники. Мн.: Радио и связь, 1986.
  4. Автоматическая сборка интегральных схем. Мн.: Вышэйшая школа, 1990 (совм. с В.А. Зеньковичем, Л.Г. Битно).